Temperature difference of substrate in Low Pressure Vacuum System
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 96 === As technologies advance, nano-size wires can be applied to semiconductors. From the 4-inch wafer manufacturing in the early age to the burgeoning 12-inch wafer production today, every transition to the next generation poses a great challenge to both equipmen...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ztsect |