A Study on the Microstructures and Electrical Properties of TiFeCoNi Alloy Thin Films
碩士 === 中國文化大學 === 材料科學與奈米科技研究所 === 96 === Four elements of Ti, Fe, Co and Ni were selected to produce equimolar TiFeCoNi alloy target in this paper. After that, the thin films were produced by the high vacuum DC sputtering processing. The effects of different annealing conditions on the microstructu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99531086749300743031 |