Analysis of Porous Silicon Thin Films and Its Applications on Optoelectronics

碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 96 === In the study, different type wafers including N-type, P-type, and N/P-type are used to form the porous silicon structures, which have a lot of tiny pores and pillars, by electrochemistry method.With the variations on the experimental parameters, such as anod...

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Bibliographic Details
Main Authors: Jui-Chia Chang, 張瑞家
Other Authors: Jia-Chuan Lin
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/93358911965055563684