The study of ZnO/LiNbO3 SAW oscillator and its sensor application
碩士 === 樹德科技大學 === 電腦與通訊研究所 === 96 === Zinc oxide (ZnO) owns the excellent piezoelectricity and therefore is used to be fabricated for the acoustic device. The ZnO film adopted as active layer because of its bandgap of 3.2 eV is also an excellent ultraviolet (UV) absorption material. There are two ty...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/31421679139663012468 |