The Consideration of Optical Proximity Effect for Dynamic Programmable Logic Arrays
碩士 === 南台科技大學 === 電子工程系 === 96 === Nowadays the development of semiconductor industrial is very fast, and the technology enters to nanometer generation at present. Since the critical dimension (CD) in the advanced technology is smaller than the wavelength and the diffraction may cause pattern distor...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72028412582291226963 |