Development of microbubble generators using micro electromechanical system (MEMS) technologies
碩士 === 國立臺北科技大學 === 機電整合研究所 === 96 === This paper describes device design and manufacturing process to generate single microbubbles for biomedical applications. With MEMS technology several cross-shaped microchannels are designed and fabricated by using the SU-8 photoresist mould and Polydimethylsil...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/x87tt3 |