Development of microbubble generators using micro electromechanical system (MEMS) technologies

• Main Authors: Ming-Lang Kau, 高銘倫
• Other Authors: 呂志誠
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/x87tt3

碩士 === 國立臺北科技大學 === 機電整合研究所 === 96 === This paper describes device design and manufacturing process to generate single microbubbles for biomedical applications. With MEMS technology several cross-shaped microchannels are designed and fabricated by using the SU-8 photoresist mould and Polydimethylsiloxance (PDMS) material. The microbubble generator controls gas and liquid inlets to segment continuous fluids, referred to as two-phase flow, in the microchannels. The void segments filled with gas thus form initial microbubbles. These microbubbles are then transferred to the next-stage microchannels for further bubble separation and size reduction. The ultimate diameter of microbubbles is expected to reach less than 50 μm. With further harden and collection processes the microbubbles are able to enhance imaging effect in ultrasound or MRI medical applications; besides, they can elevate delivery efficiency of drug or cosmetics, and more importantly, bio-effect of ultrasound gene therapy.