Gradient Layer Deposition of Composite Film On SKH9 by R.F. Magnetron Sputtering
碩士 === 國立臺北科技大學 === 機電整合研究所 === 96 === For single layer is limited by the performance of material characters, less application can be done. For overcome this drawback, more and more research on multi-layer deposition were studied recently. By using the high hardness, high thermal conductivity and lo...
Main Authors: | Tsung-Wei Cho, 卓宗蔚 |
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Other Authors: | 林啟瑞 |
Format: | Others |
Language: | zh-TW |
Published: |
2008
|
Online Access: | http://ndltd.ncl.edu.tw/handle/7f3pf2 |
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