Design and Fabrication of Low-actuation Voltage RF Switch and Varactor by CMOS-MEMS Processes
碩士 === 國立臺北科技大學 === 機電整合研究所 === 96 === In the study, we use 0.35μm and 0.18μm CMOS-MEMS to design the DC-contact RF switch which has the advantages of small area、easy fabrication、low -voltage and high RF performance. The switch is compatible with CMOS process. The switches are actuated by electrosta...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/df3xr7 |