An experimental study of the effects of a moving automatic guided vehicle on airflow patterns in clean rooms
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 96 === A moving object, such as automatic guided vehicles (AGV), automatic stockers, or other similar loaders, destroys the uni-directional airflow patterns in clean rooms. The particles provoked by wake and vortex behind the AGV possibly contaminate the wafers...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/tfwc7h |