Studies of Airflow Uniformity and Pollutant Dispersion in a TFT-LCD Clean Room
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 96 === As the progress and development of production technology, high-tech industry to process more and more stringent environmental requirements for the production of gas and chemicals needed to become more complicated, while consumption increasingly great, and...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/pzk96d |