Studies of Airflow Uniformity and Pollutant Dispersion in a TFT-LCD Clean Room
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 96 === As the progress and development of production technology, high-tech industry to process more and more stringent environmental requirements for the production of gas and chemicals needed to become more complicated, while consumption increasingly great, and...
Main Authors: | Chao-Wen Chen, 陳昭文 |
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Other Authors: | An-Shik Yang |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/pzk96d |
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