Low Temperature Deposition of Submicron Pb(Z0.52Ti0.48O3) Thin Films Using Ba(Mg1/3Ta2/3)O3 as Buffer Layer in Pulsed Laser Deposition Process
碩士 === 淡江大學 === 物理學系碩士班 === 96 === PZT (Pb(ZrTi)O3) thin films were deposition on BMT buffer layer by pulse laser deposition (PLD) in low temperature. First, we discussed the thin films properties in different growing conditions. Second we using lithography process (lift-off) made micrometer size su...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/11613071074329287000 |