Effect of focused ion beam post-treatment on the diamond-like carbon films synthesized by RF plasma enhanced chemical vapor deposition
碩士 === 大同大學 === 材料工程學系(所) === 96 === Diamond-like carbon (DLC) films were deposited on both ITO glass and Si substrates by RF plasma enhanced chemical vapor deposition and the effects of post-treatment of focused ion beam (FIB) on the structure and properties of DLC films were investigated. Before t...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/11085208415412417896 |