DESIGN AND IMPLEMENTATION OF MEMS PRESSURE SENSOR
碩士 === 雲林科技大學 === 電子與資訊工程研究所 === 96 === This paper starts with basic theorem of parallel plate capacitor and classical theorem of plate and tries to calculate several kinds of capacitive structure with the combination of pre-readout sensing circuit and signal processing system circuit on a single ch...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76444592717348118353 |