The Research of Long-Range Linear Nanometer Fringe Capacitor System
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 96 === The research is measures distance with the fringe capacitive sensor, the system included the fringe capacitive sensor , C/V circuit, array metal and piezoelectric actor. The rectangle fringe capacitive sensor measures distance with theory of fringe capacitive,...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/fmr7eg |