The Research of Long-Range Linear Nanometer Fringe Capacitor System

碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 96 === The research is measures distance with the fringe capacitive sensor, the system included the fringe capacitive sensor , C/V circuit, array metal and piezoelectric actor. The rectangle fringe capacitive sensor measures distance with theory of fringe capacitive,...

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Bibliographic Details
Main Authors: Kai-cheng Wai, 溫凱全
Other Authors: Dau-Chung Wang
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/fmr7eg