The Influence Analysis of Different Adding Gas on the Decomposition of CF4 via Microwave Plasma Torch Reactor
碩士 === 雲林科技大學 === 環境與安全工程系碩士班 === 96 === An innovative microwave plasma torch reactor, MPT-POLE, has been designed for treating the perfluorocompound (PFC) gases. By using CF4 as a modeling gas, different operating variables such as CF4 flow-rates, additive gas flow-rates, and microwave power were...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57160183621587198411 |