Design and Implementation of Ontology-Based Fuzzy Inference System:An Application Case of Semiconductor Manufacturing Process Diagnosis

碩士 === 元智大學 === 工業工程與管理學系 === 96 === This thesis proposes an ontology-based fuzzy inference (OFI) architecture using the semiconductor manufacturing process diagnosis as a driving problem. The design objective is to make all the knowledge involved in OFI process: flexible and scalable with respect t...

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Bibliographic Details
Main Authors: Yu-Tsu Liu, 劉宇祖
Other Authors: 范治民
Format: Others
Language:en_US
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/46886446043810812540