Design and Implementation of Ontology-Based Fuzzy Inference System:An Application Case of Semiconductor Manufacturing Process Diagnosis
碩士 === 元智大學 === 工業工程與管理學系 === 96 === This thesis proposes an ontology-based fuzzy inference (OFI) architecture using the semiconductor manufacturing process diagnosis as a driving problem. The design objective is to make all the knowledge involved in OFI process: flexible and scalable with respect t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/46886446043810812540 |