Micro-Hole Array Machining and Numerical Simulation by The Micro-ElectroChemical Machining(μ-ECM) Process
碩士 === 元智大學 === 機械工程學系 === 96 === The rapid development of 3C and semi-conductor industries has prompted the necessitates of micro-manufacturing technology. However, the domestic micro-manufacturing technology has been focused on MEMS and CMOS processes which were mainly surface/layered micro-machin...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60950441672060478887 |