Deposition of p-type Aluminum and Nitrogen Co-doped Zinc Oxide Transparent Conductive Thin Films by Reactive RF Magnetron Sputtering
碩士 === 長庚大學 === 化工與材料工程研究所 === 97 === The objectives of this research are to prepare p-type transparent conductive aluminum-doped zinc oxide (AZO) thin films with excellent properties by adjusting volume ratio of reactive sputtering gas N2 and by using AZO ceramic targets. In addition, the effects o...
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| Format: | Others |
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2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89683812120939027212 |