Preparation of transparent conductive gallium-doped zinc oxide thin films by RF sputtering using targets derived from co-precipitated powders
碩士 === 長庚大學 === 化工與材料工程研究所 === 97 === The objective of this research are to prepare powders of gallium-doped zinc oxide (GZO) by co-precipitation method, to produce GZO targets through ceramic processing using these powders, and to deposit n-type transparent conducting GZO thin films by RF magnetron...
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| Format: | Others |
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2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22458806250799229167 |