Growth of Al Doped ZnO as Transparent Conductive Film by RF Magnetron Sputtering

碩士 === 長庚大學 === 光電工程研究所 === 97 === As compared to In2O3 and SnO2-based transparent conductive oxides (TCOs), ZnO:Al (AZO) are especially attractive since they promise cost-effectiveness, due to the relative abundance of Zn. Furthermore, the technological applicability of AZO-based TCOs have been wel...

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Bibliographic Details
Main Authors: Jui Fu Yang, 楊瑞福
Other Authors: S. Y. Kuo
Format: Others
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/53759928017440445562