The study of cold/hot Aluminum plug process in metal interconnect
碩士 === 長庚大學 === 電子工程學研究所 === 97 === The cold\hot Al plug process is widely used to apply in gap filling of metal interconnect in the Trench DRAM product. In order to obtain better electrical performances, higher product yields, and excellent reliability in AlCu metal interconnect; it is necessary to...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/87126447769873879996 |