Superdark and Superhydrophobicity properties of two-tier silicon nanostructure
碩士 === 中華大學 === 電機工程學系(所) === 97 === This paper provides an easy and high-efficient plasma etching technique which can produce the tapered structure, nanograss ,which have even height and diameter on (100) Si wafer. By using this method, we successfully produce the structure of nanograss with 380 nm...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41814121851231573375 |