The Study of Fabrication of Microstructured Surface on Glass by Plasma Etching Method
碩士 === 中華大學 === 機械工程學系碩士班 === 97 === The glass plates with patterned structure on the surface have great potential for MEMS, opto-electrical and biomedical applications. It is difficult to produce micro/nano-pattern on glass material by traditional machining process. The aim of this research is to f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44231330764842898321 |