Data-Driven Run-to-Run Controllers Using Combinational Control of Deterministic Models and Stochastic Models for Production Processes with Stochastic Distribution Characteristics
碩士 === 中原大學 === 化學工程研究所 === 97 === In recent years, semiconductor manufacturing has swiftly evolved as a lucrative industry with high capital investment. Most actual manufacturing processes experience deterministic changes, such as set-point changes and process drifts. In addition, the output variab...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14442800948615497019 |