The specific analysis for glass cleaning by AP-P
碩士 === 中原大學 === 電子工程研究所 === 97 === There are two main topics in this article, first is the un-removable organic particles from the cleaning then efficiently removed by the plasma process. Currently, the UV light is using to decompose the organic particles, and improves the substrate hydrophilic surf...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/59364895234486351226 |