Prediction of Surface Resistance Uniformity of PVD Process Based on Virtual Metrology Technique
碩士 === 中原大學 === 機械工程研究所 === 97 === Abstract TFT-LCD display has replaced the traditional CRT because of its advantages, such as lightweight, portability, and small volume. However, under the extreme competition, TFT-LCD plants have to not only market but also promote their product quality in order...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85760717285307755624 |