Study on Nitride Films of TiVCrAlZr by Radio Frequency Magnetron Sputtering
碩士 === 中原大學 === 機械工程研究所 === 97 === In this thesis, the target of high-entropy alloy, TiVCrAlZr, was smelted by electric arc smelting furnace of vacuum. Then the Nitride thin films of TiVCrAlZr were deposited on silicon wafer by Radio Frequency (RF) Magnetron Sputtering. This experiments were discuss...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15030392869423125686 |