Study on the Fabrication of Copper Microcolumn Array Structure by Localized Electrochemical Deposition

碩士 === 大葉大學 === 機械與自動化工程學系 === 97 === Usually for the structure which is fabricated by micro-forming process, the mechanical structure and material property are easily affected by the fabrication method used. In this study, we improved the localized electrochemical deposition by employing horizonta...

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Bibliographic Details
Main Authors: Bo-Yi Lu, 盧柏屹
Other Authors: Yi-Fang Chang
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/44005401855350726564