Study on the Fabrication of Copper Microcolumn Array Structure by Localized Electrochemical Deposition
碩士 === 大葉大學 === 機械與自動化工程學系 === 97 === Usually for the structure which is fabricated by micro-forming process, the mechanical structure and material property are easily affected by the fabrication method used. In this study, we improved the localized electrochemical deposition by employing horizonta...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/44005401855350726564 |