Fabrication and Characterization of MEMS-based Flow Sensors
碩士 === 大葉大學 === 機械與自動化工程學系 === 97 === The purpose of this study wind speed sensor. Research on the use of Micro-electro-mechanical process technology, to produce alumina for the substrate material for the heater and the platinum thin film of hot-film flowmeter, hotline type of way to make thin-film...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82408317819721659530 |