Amorphous IGZO thin films prepared by sol-gel method and their application for thin-film transistors
碩士 === 逢甲大學 === 材料科學所 === 97 === In this study, we prepared amorphous InGaZnO semiconductor thin films by sol-gel process. The effects of In/(In+Ga) ratio (0.5~1) and heat treatment temperatures on crystalline, resistivity and optical properties for IGZO thin films were discussed. Furthermore, thin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70572376880099917897 |