Pd-free Electroless NiP on Silicon and Its Application for Shallow Junctions of ULSI
碩士 === 逢甲大學 === 產業研發碩士班 === 97 === In this thesis, the characteristics of electroless nickel phosphorus on silicon and its application for shallow junctions of ULSI. Pd-free electroless nickel-phosphorus films were successfully fabricated using the oxidation reduction methods. This method has select...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91517850200432919689 |