Development of Microsensors for NOx Gas Detection Based on Porous Silicon and Nano Structures
碩士 === 逢甲大學 === 產業研發碩士班 === 97 === This study presents the design of metal-oxide micro gas sensors based on MEMS technology with porous silicon and nano-properties for NOx gas sensing in low concentration(5ppm) at relative low temperature(25℃∼60℃). Sensitivity is defined by measuring the variation o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32929131471077364547 |