The Fabrication and Analysis of Bulk Micromachining Electrostatic-Actuated Deformable Micro Mirror
碩士 === 逢甲大學 === 機械工程學所 === 97 === An electrostatic actuated micro deformable focusing mirror is designed in this work. Under different applying voltages, mirror is deformed and having various focal lengths. Bulk micromachining and wafer bonding are used as fabrication processes. For detail discussio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16498773053114999744 |