Investigation of the Resistivity Depending on Content, Structure and Temperature of AZO Films Fabricated by Ion Beam co-sputtering Technique
碩士 === 輔仁大學 === 物理學系 === 97 === In this study, aluminum-doped zinc oxide (AZO) thin films were deposited at room temperature on the glass substrates with a co-sputtering method by ion-beam sputtering. During the deposition, an ion beam simultaneously bombards Zn and Al targets which have high purity...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73141584397467799434 |