Data Mining Technique in Wafer Process Alarm Data Analysis
碩士 === 輔仁大學 === 應用統計學研究所 === 97 === In the semiconductor manufacturing process, because of the cumbersome process and a large amount of data, and the manufacturing process with the development of new products with each passing day, leading to not be able to do data analysis, the majority of paramet...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15411001646415671238 |