Simulation of Micro Beams Actuated by Electrostatic with COMSOL
碩士 === 華梵大學 === 機電工程學系博碩專班 === 97 === This thesis is mainly based on the numerical simulation method to analyze the pull-in phenomenon on the micro beam driven by static electricity. The research contents are separated into coupling effect of micro beam and electrostatic field and the deflection of...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65316343960681411833 |