A study of grinding characteristics for UV-LIGA fabrication of micro-type diamond wheelsA study of grinding characteristics for UV-LIGA fabrication of micro-type diamond wheelsA study of grinding characteristics for UV-LIGA fabrication of micro-type d
碩士 === 華梵大學 === 機電工程學系博碩專班 === 97 === The purpose of this paper is to develop a micro type diamond wheel combined a micro arbor that can be applied to precision micro grinding. Joining method between the micro wheel and the micro arbor was investigated and the grinding process for the silicon wafer...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93781450634388820075 |