Physical properties of diluted magnetic epitaxial ZnO thin films
碩士 === 義守大學 === 材料科學與工程學系碩士班 === 97 === The main goal of this study is to deposit the dilute-magnetic epitaxial ZnO thin films in the C-plane sapphire substrate by using the RF magnetron sputtering system. It is divided into three parts:(1) to explore the best epitaxial condition of the ZnO thin fi...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/89451408866707338935 |