Research of Patterned Sapphire Substrate and CopperElectroplating Technology for GaN-Based LightEmitting Diodes
碩士 === 崑山科技大學 === 電子工程研究所 === 97 === The wet etching law with the simple low cost that this thesis developed,to the sapphire (sapphire, Al2O3) The patterned that the substrate carries on the high depth is etched, it is a sulphuric acid (H2SO4) to etch the solution And the phosphoric acid (H3PO4) Wit...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77913074515976596089 |