Innovation of Water Mist and Activated Carbon for the Treatment of Fluorine Gas from the Process Tool in IC/TFT Fab.
碩士 === 崑山科技大學 === 環境工程研究所 === 97 === Innovation of water mist and activated carbon for fluorine gas treatment was studied under various type of activated carbon, degrees of water content and solution pH in order to find the optimum system for fluorine gas treatment. The outlet concentration of fluor...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/342jyc |