Fundamental and Application Study of Reactivity between Activated Carbon and Waste Aqueous Ozone from O3/DI Process in TFT/IC Industry
碩士 === 崑山科技大學 === 環境工程研究所 === 97 === “Fundamental and Application Study of Reactivity between Activated Carbon and Waste Aqueous Ozone from O3/DI Process in TFT/IC Industry” was carried out in this study. The research was studied under various solution pH values, types of activated carbon for the es...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7983t9 |