Characterization of Cu-Al-O Thin Films Annealed at High Temperature under Controlled Atmosphere
碩士 === 國立高雄應用科技大學 === 化學工程與材料工程系 === 97 === In this study, Cu-Al-O films were annealed at high temperature under various atmosphere and then the microstructural changes and the related properties of the films are also examined. The Cu-Al-O films were deposited onto silicon substrates by using dc rea...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36402855961222351532 |