Study on the Layer SAW Devices of the ZnO Thin Film
碩士 === 國立高雄應用科技大學 === 電子工程系 === 97 === In this research, we deposited the ZnO thin film with C-axis orientation on the Quartz substrate by reactive RF magnetron sputtering method.The micro-structures of the ZnO thin film were measured by X-ray diffraction, profile meter and atomic force microscopy.W...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08257961635213344863 |