Study on the Design and Fabrication of a Single Crystalline Silicon Infrared Micro-Emitter
碩士 === 國立高雄應用科技大學 === 光電與通訊研究所 === 97 === The purpose of this thesis is to fabricate a silicon infrared micro-emitter on a silicon wafer. In our work, we designed plate-type thermal infrared micro-emitters and bridge-type micro-emitters. In our process design, p+ diffusion process was used in order...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19162455586167948441 |