Fabrication of Silicon Nanowires and its Applications in Thermoelectric Nanodevice
碩士 === 高苑科技大學 === 電子工程研究所 === 97 === The present study is aimed to develop the fabrication techniques of silicon nanowires by electroless etch method and the silicon nanowire based thermoelectric nanodevice. Firstly, the etch rate equation of electroless etch method is obtained and the uniformity o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16554107035721990668 |