A study of Ga-Al-doped ZnO ceramic thin film
碩士 === 龍華科技大學 === 工程技術研究所 === 97 === The purpose of this study are divided into two major parts: (1) Preparation of ceramic target and (2) Preparation of transparent conductive films. Using RF magnetron sputtering system in the optical glass on the preparation of transparent conductive films. At hom...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/00041638472936807474 |