Preparation of ZnO:Ga transparent conductingoxide thin films at room temperature
碩士 === 龍華科技大學 === 工程技術研究所 === 97 === Gallium-doped zinc oxide films have been grown on glass substrates with and without ZnO buffer layers by r.f. magnetron sputtering at room temperature. In this approach, the grey relational Taguchi method analysis is adopted to solve the coating process with mult...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04867396271447857156 |