The study of monitoring the equipment parameter in process of semiconductors
碩士 === 銘傳大學 === 應用統計資訊學系碩士班 === 97 === When a wafer was lead into the equipment for processing, the parameter values during the process are recorded continuously by the equipment and these values is called the signal process in general. In practice, the signal process may be influenced by some varia...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15891609156741238570 |